Miniaturization of inductively coupled plasma sources ...
2004-3-25u2002·u2002source was poor due to the large parasitic resistance of the 20-turn coil and large RF coil currents due to the low operating frequency. B. Spiral Coil Design The key to creating an efficient miniature ICP is controlling the resistance of the coil by designing a proper coil geometry and operating the ICP at the optimum frequency. In addition
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